Microwave apparatus for depositing thin films

Application number :: 55981
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Microwave apparatus for depositing thin films
Inventor :: Izu, Masatsugu ; Hasegawa, Wataru ; Ovshinsky, Stanford R. ; Dotter, Buddie R. II
Agent name :
Address for service :
Filing date :: 10 November 1993
Associated companies :
Applicant name :: Energy Conversion Devices Inc.
Applicant address :
Old name :
Original Source :: Go

Microwave apparatus for depositing thin films A Standard patent application filed on 10 November 1993 credited to Izu, Masatsugu ; Hasegawa, Wataru ; Ovshinsky, Stanford R. ; Dotter, Buddie R. II