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Vaporizer for thin film deposition apparatus
A Standard patent application filed on 14 July 2003 credited to Cho, Byung-Chul ; Lee, Sang-Kyu ; Yoo, Keun-Jae ; Kyung, Hyun-Soo
Details
Application number :
2003281548
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Vaporizer for thin film deposition apparatus
Inventor :
Cho, Byung-Chul ; Lee, Sang-Kyu ; Yoo, Keun-Jae ; Kyung, Hyun-Soo
Agent name :
Address for service :
Filing date :
14 July 2003
Associated companies :
Applicant name :
IPS LTD.
Applicant address :
33, Jije-dong, Pyungtaek-city, 450-090 Kyungki-do
Old name :
Original Source :
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