Tiltable electrostatic microactuator and method for using same
A Standard patent application filed on 05 January 2001 credited to Grade, John D.
;
Jerman, John H
Details
Application number :
29296
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Tiltable electrostatic microactuator and method for using same