Electrostatic microactuator with offset and/or inclined comb drive fingers
A Standard patent application filed on 12 April 2000 credited to Jerman, John H
;
Grade, John D.
Details
Application number :
43460
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Electrostatic microactuator with offset and/or inclined comb drive fingers