Micromechanical device with damped microactuator
A Standard patent application filed on 06 June 2001 credited to Grade, John D.
;
Drake, Joseph D.
;
Jerman, John H
Details
Application number :
2001275514
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Micromechanical device with damped microactuator
Inventor :
Grade, John D.
;
Drake, Joseph D.
;
Jerman, John H