Damped micromechanical device and method for making same
A Standard patent application filed on 06 June 2001 credited to Grade, John D.
;
Yasumura, Kevin Y.
;
Drake, Joseph D.
;
Jerman, John H
Details
Application number :
2001265426
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Damped micromechanical device and method for making same
Inventor :
Grade, John D.
;
Yasumura, Kevin Y.
;
Drake, Joseph D.
;
Jerman, John H