Details
- Application number :
- 11761
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Aligner, exposure method and device manufacturing method
- Inventor :
- Murakami, Seiro
;
Miura, Takaharu
;
Mizutani, Hideo
;
Ichihara, Yutaka
;
Tanimoto, Akikazu
- Agent name :
-
- Address for service :
-
- Filing date :
- 24 November 1998
- Associated companies :
-
- Applicant name :
- Nikon Corporation
- Applicant address :
-
- Old name :
-
- Original Source :
- Go