Stage device, a scanning aligner and a scanning exposure method, and a device manufactured thereby
A Standard patent application filed on 18 September 1998 credited to Nishi, Kenji

Details

Application number :
90957  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Stage device, a scanning aligner and a scanning exposure method, and a device manufactured thereby  
Inventor :
Nishi, Kenji  
Agent name :
 
Address for service :
 
Filing date :
18 September 1998  
Associated companies :
 
Applicant name :
Nikon Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor