Projection aligner, method of manufacturing the aligner, method of exposure using the aligner, and method of manufacturing circuit devices by using the aligner
A Standard patent application filed on 25 June 1998 credited to Tanaka, Yasuaki

Details

Application number :
79334  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Projection aligner, method of manufacturing the aligner, method of exposure using the aligner, and method of manufacturing circuit devices by using the aligner  
Inventor :
Tanaka, Yasuaki  
Agent name :
 
Address for service :
 
Filing date :
25 June 1998  
Associated companies :
 
Applicant name :
Nikon Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor