Stepper or scanner having two energy monitors for a laser
A Standard patent application filed on 27 July 1998 credited to Fomenkov, Igor V ; Das, Palash P

Details

Application number :

86645  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Stepper or scanner having two energy monitors for a laser  

Inventor :

Fomenkov, Igor V ; Das, Palash P  

Agent name :

 

Address for service :

 

Filing date :

27 July 1998  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

Go  

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