Narrow band laser with fine wavelength control
A Standard patent application filed on 31 August 2000 credited to Algots, John M. ; Marchi, Christopher A. ; Erie, Frederick G. ; Fomenkov, Igor V ; Ershov, Alexander I. ; Das, Palash P ; Buck, Jesse D.

Details

Application number :

74749  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Narrow band laser with fine wavelength control  

Inventor :

Algots, John M. ; Marchi, Christopher A. ; Erie, Frederick G. ; Fomenkov, Igor V ; Ershov, Alexander I. ; Das, Palash P ; Buck, Jesse D.  

Agent name :

 

Address for service :

 

Filing date :

31 August 2000  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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