Laser-illuminated stepper or scanner with energy sensor feedback
A Standard patent application filed on 31 July 1998 credited to Sandstrom, Richard L ; Das, Palash P ; Ozarski, Robert G. ; Besaucele, Herve A. ; Fomenkov, Igor V

Details

Application number :

87639  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Laser-illuminated stepper or scanner with energy sensor feedback  

Inventor :

Sandstrom, Richard L ; Das, Palash P ; Ozarski, Robert G. ; Besaucele, Herve A. ; Fomenkov, Igor V  

Agent name :

 

Address for service :

 

Filing date :

31 July 1998  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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