Wavelength shift correction technique for a laser
A Standard patent application filed on 17 June 1998 credited to Everage, George J. ; Sandstrom, Richard L ; Das, Palash P ; Fomenkov, Igor V

Details

Application number :

79655  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Wavelength shift correction technique for a laser  

Inventor :

Everage, George J. ; Sandstrom, Richard L ; Das, Palash P ; Fomenkov, Igor V  

Agent name :

 

Address for service :

 

Filing date :

17 June 1998  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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