Excimer laser with greater spectral bandwidth and beam stability
A Standard patent application filed on 14 January 1998 credited to Sandstrom, Richard L ; Fomenkov, Igor V

Details

Application number :

63166  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Excimer laser with greater spectral bandwidth and beam stability  

Inventor :

Sandstrom, Richard L ; Fomenkov, Igor V  

Agent name :

 

Address for service :

 

Filing date :

14 January 1998  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

Go  

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