High power gas discharge laser with helium purged line narrowing unit
A Standard patent application filed on 22 November 2000 credited to Partlo, William N ; Sandstrom, Richard L ; Ershov, Alexander I. ; Fomenkov, Igor V ; Cybulski, Raymond F.

Details

Application number :

18002  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

High power gas discharge laser with helium purged line narrowing unit  

Inventor :

Partlo, William N ; Sandstrom, Richard L ; Ershov, Alexander I. ; Fomenkov, Igor V ; Cybulski, Raymond F.  

Agent name :

 

Address for service :

 

Filing date :

22 November 2000  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

Go