Details

Application number :
51760  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method for adjusting semiconductor processing equipment  
Inventor :
Hawkins, Mark R. ; Van Der Jeugd, Cornelius A. ; Vyne, Robert M.  
Agent name :
 
Address for service :
 
Filing date :
07 November 1997  
Associated companies :
 
Applicant name :
Advanced Semiconductor Materials America, Inc.  
Applicant address :
 
Old name :
 
Original Source :
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Same Inventor