Semiconductor processing equipment having radiant heated ceramic liner
A Standard patent application filed on 11 September 2000 credited to Kennedy, William S. ; Wicker, Thomas E. ; Maraschin, Robert A.

Details

Application number :
73683  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Semiconductor processing equipment having radiant heated ceramic liner  
Inventor :
Kennedy, William S. ; Wicker, Thomas E. ; Maraschin, Robert A.  
Agent name :
 
Address for service :
 
Filing date :
11 September 2000  
Associated companies :
 
Applicant name :
Lam Research Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor