Temperature controlling method and apparatus for a plasma processing chamber
A Standard patent application filed on 02 June 1997 credited to Wicker, Thomas E. ; Cook, Joel M. ; Benjamin, Neil ; Kennedy, William S. ; Maraschin, Robert A.

Details

Application number :

30795  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Temperature controlling method and apparatus for a plasma processing chamber  

Inventor :

Wicker, Thomas E. ; Cook, Joel M. ; Benjamin, Neil ; Kennedy, William S. ; Maraschin, Robert A.  

Agent name :

 

Address for service :

 

Filing date :

02 June 1997  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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