Apparatus for reducing polymer deposition on substrate support
A Standard patent application filed on 30 September 1997 credited to Kennedy, William S. ; Wicker, Thomas E. ; Schoepp, Alan M. ; Cook, Joel M. ; Maraschin, Robert A.

Details

Application number :

47414  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus for reducing polymer deposition on substrate support  

Inventor :

Kennedy, William S. ; Wicker, Thomas E. ; Schoepp, Alan M. ; Cook, Joel M. ; Maraschin, Robert A.  

Agent name :

 

Address for service :

 

Filing date :

30 September 1997  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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