Apparatus for forming deposited film
A Standard patent application filed on 22 May 1989 credited to Ishihara, Shunichi ; Hirooka, Masaaki ; Shimizu, Isamu ; Hanna, Junichi

Details

Application number :
35050  
Application type :
Standard  
Application status :
EXPIRED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Apparatus for forming deposited film  
Inventor :
Ishihara, Shunichi ; Hirooka, Masaaki ; Shimizu, Isamu ; Hanna, Junichi  
Agent name :
SPRUSON & FERGUSON  
Address for service :
GPO Box 3898 SYDNEY NSW 2001  
Filing date :
22 May 1989  
Associated companies :
 
Applicant name :
Canon Kabushiki Kaisha  
Applicant address :
30-2, 3-Chome, Shimomaruko, Ohta-Ku, Tokyo, Japan  
Old name :
 
Original Source :
Go  

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