Details
- Application number :
- 2002353611
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Apparatus of chemical vapor deposition for forming a thin film
- Inventor :
- Um, Pyung-Yong
- Agent name :
-
- Address for service :
-
- Filing date :
- 15 November 2002
- Associated companies :
-
- Applicant name :
- EUGENE TECHNOLOGY CO., LTD.
- Applicant address :
- 4-3, Chaam-Dong, 330-200 Cheonan
- Old name :
-
- Original Source :
- Go