Apparatus and method for forming deposited film
A Standard patent application filed on 29 January 2001 credited to Shishido, Takeshi ; Yajima, Takahiro ; Koda, Yuzo ; Kanai, Masahiro

Details

Application number :
16704  
Application type :
Standard  
Application status :
SEALED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Apparatus and method for forming deposited film  
Inventor :
Shishido, Takeshi ; Yajima, Takahiro ; Koda, Yuzo ; Kanai, Masahiro  
Agent name :
SPRUSON & FERGUSON  
Address for service :
GPO Box 3898 SYDNEY NSW 2001  
Filing date :
29 January 2001  
Associated companies :
 
Applicant name :
Canon Kabushiki Kaisha  
Applicant address :
30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146 Japan  
Old name :
 
Original Source :
Go  

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