Method and apparatus for endpoint detection for chemical mechanical polishing

Application number :: 38976
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Method and apparatus for endpoint detection for chemical mechanical polishing
Inventor :: Bibby, Thomas Frederick Allen Jr. ; Eaton, Robert A. ; Adams, John A.
Agent name :
Address for service :
Filing date :: 17 March 2000
Associated companies :
Applicant name :: Speed-Fam-Ipec Corporation
Applicant address :
Old name :
Original Source :: Go

Method and apparatus for endpoint detection for chemical mechanical polishing A Standard patent application filed on 17 March 2000 credited to Bibby, Thomas Frederick Allen Jr. ; Eaton, Robert A. ; Adams, John A.