Details

Application number :
2003225113  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Apparatus and method for endpoint detection and monitoring for chemical mechanical polishing operations  
Inventor :
Mautz, Karl E.  
Agent name :
 
Address for service :
 
Filing date :
23 April 2003  
Associated companies :
 
Applicant name :
FREESCALE SEMICONDUCTOR, INC.  
Applicant address :
6501 William Cannon Drive West, Austin,TX 78735 USA  
Old name :
 
Original Source :
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Same Inventor