Method and apparatus for endpoint detection during chemical mechanical polishing
A Standard patent application filed on 06 November 2002 credited to Parikh, Prabodh J.

Details

Application number :

2002348184  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for endpoint detection during chemical mechanical polishing  

Inventor :

Parikh, Prabodh J.  

Agent name :

 

Address for service :

 

Filing date :

06 November 2002  

Associated companies :

 

Applicant name :

SPEEDFAM-IPEC CORPORATION  

Applicant address :

Attention: James L. Farmer, Esq., (480) 705-2668, 305 North 54th Street, Chandler, AZ 85226  

Old name :

 

Original Source :

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