Details

Application number :
2002348184  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for endpoint detection during chemical mechanical polishing  
Inventor :
Parikh, Prabodh J.  
Agent name :
 
Address for service :
 
Filing date :
06 November 2002  
Associated companies :
 
Applicant name :
SPEEDFAM-IPEC CORPORATION  
Applicant address :
Attention: James L. Farmer, Esq., (480) 705-2668, 305 North 54th Street, Chandler, AZ 85226  
Old name :
 
Original Source :
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