Details
- Application number :
- 2003289126
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Illumination optical system, exposure system, and exposure method
- Inventor :
- Tanaka, Hirohisa
;
Nishinaga, Hisashi
;
Muramatsu, Kenichi
;
Matsuyama, Tomoyuki
;
Tanitsu, Osamu
;
Kudo, Takehito
;
Komine, Norio
- Agent name :
-
- Address for service :
-
- Filing date :
- 02 December 2003
- Associated companies :
-
- Applicant name :
- NIKON CORPORATION
- Applicant address :
- 2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331
- Old name :
-
- Original Source :
- Go