Mask and production method therefor, optical element and production method therefor, and illuminating opticdal device provided with the optical element and exposure system
A Standard patent application filed on 13 May 2002 credited to Goto, Akihiro
Details
Application number :
2002308941
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Mask and production method therefor, optical element and production method therefor, and illuminating opticdal device provided with the optical element and exposure system
Inventor :
Goto, Akihiro
Agent name :
Address for service :
Filing date :
13 May 2002
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331