Details

Application number :
2002354091  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Diffraction optical device, refraction optical device, illuminating optical device, exposure system and exposure method  
Inventor :
Tanitsu, Osamu ; Toyoda, Mitsunori  
Agent name :
 
Address for service :
 
Filing date :
04 December 2002  
Associated companies :
 
Applicant name :
NIKON CORPORATION  
Applicant address :
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331  
Old name :
 
Original Source :
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