Diffraction optical device, refraction optical device, illuminating optical device, exposure system and exposure method
A Standard patent application filed on 04 December 2002 credited to Tanitsu, Osamu
;
Toyoda, Mitsunori
Details
Application number :
2002354091
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Diffraction optical device, refraction optical device, illuminating optical device, exposure system and exposure method
Inventor :
Tanitsu, Osamu
;
Toyoda, Mitsunori
Agent name :
Address for service :
Filing date :
04 December 2002
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331