Illumination optical system, illuminating device, projection exposure apparatus and exposure method
A Standard patent application filed on 26 December 2003 credited to Mitarai, Kiyoshi ; Suzuki, Kenji

Details

Application number :

2003296167  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Illumination optical system, illuminating device, projection exposure apparatus and exposure method  

Inventor :

Mitarai, Kiyoshi ; Suzuki, Kenji  

Agent name :

 

Address for service :

 

Filing date :

26 December 2003  

Associated companies :

 

Applicant name :

NIKON CORPORATION  

Applicant address :

2-3, Marunouchi 3-Chome, Chiyoda-ku, Tokyo 100-8331  

Old name :

 

Original Source :

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