Details
- Application number :
- 32296
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Chemical vapor deposition of tungsten nitride
- Inventor :
- Kaloyeros, Alain E
;
Arkles, Barry C
- Agent name :
-
- Address for service :
-
- Filing date :
- 11 February 2000
- Associated companies :
-
- Applicant name :
- Gelest, Inc.
- Applicant address :
-
- Old name :
-
- Original Source :
- Go
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