Silicon nitrogen-based films and method of making the same
A Standard patent application filed on 03 November 1998 credited to Kaloyeros, Alain E ; Arkles, Barry C

Details

Application number :
12086  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Silicon nitrogen-based films and method of making the same  
Inventor :
Kaloyeros, Alain E ; Arkles, Barry C  
Agent name :
 
Address for service :
 
Filing date :
03 November 1998  
Associated companies :
 
Applicant name :
Gelest, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor