Substrate transfer apparatus
A Standard patent application filed on 24 April 2003 credited to Cox, Damon
;
Ponnekanti, Hari
;
Hudgens, Jeffrey C.
;
Shah, Vinay K.
;
Rice, Michael Robert
;
Lowrance, Robert B.
;
Belitsky, Victor
;
Kraus, Joseph Arthur
Details
Application number :
2003234206
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Substrate transfer apparatus
Inventor :
Cox, Damon
;
Ponnekanti, Hari
;
Hudgens, Jeffrey C.
;
Shah, Vinay K.
;
Rice, Michael Robert
;
Lowrance, Robert B.
;
Belitsky, Victor
;
Kraus, Joseph Arthur