Details

Application number :
18578  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for transferring a reticle pattern to large area substrate by scanning  
Inventor :
Knirck, Jeffrey G. ; Swanson, Paul A. ; Gibson, John A.  
Agent name :
 
Address for service :
 
Filing date :
06 February 1997  
Associated companies :
 
Applicant name :
Megapanel Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor