Method and apparatus for transfer of a reticle pattern onto a substrate by scanning
A Standard patent application filed on 14 October 1997 credited to Swanson, Paul A. ; Knirck, Jeffrey G.

Details

Application number :
48237  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for transfer of a reticle pattern onto a substrate by scanning  
Inventor :
Swanson, Paul A. ; Knirck, Jeffrey G.  
Agent name :
 
Address for service :
 
Filing date :
14 October 1997  
Associated companies :
 
Applicant name :
Megapanel Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor