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Wafer scribing method and wafer scribing device
A Standard patent application filed on 04 October 2002 credited to Marx, Eckhard ; Peiter, Martin ; Mautz, Karl E.
Details
Application number :
2002332048
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Wafer scribing method and wafer scribing device
Inventor :
Marx, Eckhard ; Peiter, Martin ; Mautz, Karl E.
Agent name :
Address for service :
Filing date :
04 October 2002
Associated companies :
Applicant name :
MOTOROLA, INC.
Applicant address :
1303 East Algonquin Road, Schaumburg, IL 60196
Old name :
Original Source :
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