Temperature-controlled chuck and method for controlling the temperature of a substantially flat object
A Standard patent application filed on 24 April 2002 credited to Charles, Alain B.
;
Mautz, Karl E.
;
Maltabes, John G.
Details
Application number :
2002311852
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Temperature-controlled chuck and method for controlling the temperature of a substantially flat object
Inventor :
Charles, Alain B.
;
Mautz, Karl E.
;
Maltabes, John G.
Agent name :
Address for service :
Filing date :
24 April 2002
Associated companies :
Applicant name :
MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE