A plasma processing apparatus and method

Application number :: 2003211035
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: A plasma processing apparatus and method
Inventor :: Fischer, Andreas ; Loewenhardt, Peter ; Trussel, Dave ; Kennedy, Bill
Agent name :
Address for service :
Filing date :: 14 February 2003
Associated companies :
Applicant name :: LAM RESEARCH CORPORATION
Applicant address :: 4650 Cushing Parkway CA-1, Fremont, CA 94538
Old name :
Original Source :: Go

A plasma processing apparatus and method A Standard patent application filed on 14 February 2003 credited to Fischer, Andreas ; Loewenhardt, Peter ; Trussel, Dave ; Kennedy, Bill