Methods and apparatus for controlling ion energy and plasma density in a plasma processing system
A Standard patent application filed on 15 April 1998 credited to Williams, Norman ; Patrick, Roger

Details

Application number :

71112  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Methods and apparatus for controlling ion energy and plasma density in a plasma processing system  

Inventor :

Williams, Norman ; Patrick, Roger  

Agent name :

 

Address for service :

 

Filing date :

15 April 1998  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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