Plasma processing system, apparatus, and method for delivering rf power to a plasma processing chamber
A Standard patent application filed on 15 June 2000 credited to Fischer, Andreas ; Kuthi, Andras ; Kadkhodayan, Babak

Details

Application number :

61992  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Plasma processing system, apparatus, and method for delivering rf power to a plasma processing chamber  

Inventor :

Fischer, Andreas ; Kuthi, Andras ; Kadkhodayan, Babak  

Agent name :

 

Address for service :

 

Filing date :

15 June 2000  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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