Details
- Application number :
- 2003205849
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Plasma processing apparatus
- Inventor :
- Green, Gordon Robert
- Agent name :
-
- Address for service :
-
- Filing date :
- 04 February 2003
- Associated companies :
-
- Applicant name :
- TRIKON TECHNOLOGIES LIMITED
- Applicant address :
- Coed Rhedyn, Ringland Way, Newport, Gwent NP18 2TA
- Old name :
-
- Original Source :
- Go
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