Details
- Application number :
- 2001271030
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Plasma processing apparatus
- Inventor :
- Shinohara, Kibatsu
;
Yasaka, Yasuyoshi
;
Ishii, Nobuo
- Agent name :
-
- Address for service :
-
- Filing date :
- 11 July 2001
- Associated companies :
-
- Applicant name :
- Tokyo electron Limited
- Applicant address :
-
- Old name :
-
- Original Source :
- Go
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