Pedestal for mounting semiconductor fabrication equipments
A Standard patent application filed on 27 February 2003 credited to Trowell, Robert Kenneth ; Green, Gordon Robert

Details

Application number :

2003214376  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Pedestal for mounting semiconductor fabrication equipments  

Inventor :

Trowell, Robert Kenneth ; Green, Gordon Robert  

Agent name :

 

Address for service :

 

Filing date :

27 February 2003  

Associated companies :

 

Applicant name :

TRIKON TECHNOLOGIES LIMITED  

Applicant address :

Coed Rhedyn, Ringland Way, Newport, Gwent NP6 2TA  

Old name :

 

Original Source :

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