Substrate processing method and substrate processing apparatus

Application number :: 2002354143
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Substrate processing method and substrate processing apparatus
Inventor :: Hirayama, Masaki ; Ohmi, Tadahiro ; Sugawa, Shigetoshi
Agent name :
Address for service :
Filing date :: 10 December 2002
Associated companies :
Applicant name :: OHMI, Tadahiro
Applicant address :: 1-17-301, Komegafukuro 2-Chome, Aoba-Ku, Sendai-Shi, Miyagi 980-0813
Old name :
Original Source :: Go

Substrate processing method and substrate processing apparatus A Standard patent application filed on 10 December 2002 credited to Hirayama, Masaki ; Ohmi, Tadahiro ; Sugawa, Shigetoshi