Substrate processing apparatus and method
A Standard patent application filed on 30 October 2003 credited to Tajima, Kaori ; Yamaguchi, Ryuta ; Kobayashi, Naoaki ; Ori, Kohsuke

Details

Application number :
2003286823  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Substrate processing apparatus and method  
Inventor :
Tajima, Kaori ; Yamaguchi, Ryuta ; Kobayashi, Naoaki ; Ori, Kohsuke  
Agent name :
 
Address for service :
 
Filing date :
30 October 2003  
Associated companies :
 
Applicant name :
LAM RESEARCH CORPORATION  
Applicant address :
4650 Cushing Parkway, Fremont, CA 94538  
Old name :
 
Original Source :
Go  

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