Locator pin integrated with sensor for detecting semiconductor substrate carrier

Application number :: 2002345930
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Locator pin integrated with sensor for detecting semiconductor substrate carrier
Inventor :: Elliott, Martin R. ; Hudgens, Jeffrey C.
Agent name :
Address for service :
Filing date :: 26 June 2002
Associated companies :
Applicant name :: APPLIED MATERIALS, INC.
Applicant address :: 3050 Bowers Avenue, Santa Clara, CA 95054
Old name :
Original Source :: Go

Locator pin integrated with sensor for detecting semiconductor substrate carrier A Standard patent application filed on 26 June 2002 credited to Elliott, Martin R. ; Hudgens, Jeffrey C.