Details

Application number :
2002345930  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Locator pin integrated with sensor for detecting semiconductor substrate carrier  
Inventor :
Elliott, Martin R. ; Hudgens, Jeffrey C.  
Agent name :
 
Address for service :
 
Filing date :
26 June 2002  
Associated companies :
 
Applicant name :
APPLIED MATERIALS, INC.  
Applicant address :
3050 Bowers Avenue, Santa Clara, CA 95054  
Old name :
 
Original Source :
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Same Inventor