Automatic calibration method for substrate carrier handling robot and jig for performing the method
A Standard patent application filed on 18 December 2002 credited to Hudgens, Jeffrey C. ; Elliott, Martin R. ; Van Katwyk, Kirk

Details

Application number :

2002360624  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Automatic calibration method for substrate carrier handling robot and jig for performing the method  

Inventor :

Hudgens, Jeffrey C. ; Elliott, Martin R. ; Van Katwyk, Kirk  

Agent name :

 

Address for service :

 

Filing date :

18 December 2002  

Associated companies :

 

Applicant name :

APPLIED MATERIALS, INC.  

Applicant address :

3050 Bowers Avenue, Santa Clara, CA 95054  

Old name :

 

Original Source :

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