Robot for handling semiconductor wafers
A Standard patent application filed on 28 April 2003 credited to Pencis, Chris ; Cox, Damon ; Rice, Michael Robert ; Elliott, Martin R. ; Hudgens, Jeffrey C.

Details

Application number :

2003234260  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Robot for handling semiconductor wafers  

Inventor :

Pencis, Chris ; Cox, Damon ; Rice, Michael Robert ; Elliott, Martin R. ; Hudgens, Jeffrey C.  

Agent name :

 

Address for service :

 

Filing date :

28 April 2003  

Associated companies :

 

Applicant name :

APPLIED MATERIALS, INC.  

Applicant address :

3050 Bowers Avenue, Santa Clara, CA 95054  

Old name :

 

Original Source :

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