Method and apparatus for supplying substrates to a processing tool
A Standard patent application filed on 28 August 2003 credited to Englhardt, Eric A. ; Hudgens, Jeffrey C. ; Lowrance, Robert B. ; Rice, Michael R. ; Elliott, Martin R.

Details

Application number :
2003265798  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for supplying substrates to a processing tool  
Inventor :
Englhardt, Eric A. ; Hudgens, Jeffrey C. ; Lowrance, Robert B. ; Rice, Michael R. ; Elliott, Martin R.  
Agent name :
 
Address for service :
 
Filing date :
28 August 2003  
Associated companies :
 
Applicant name :
APPLIED MATERIALS, INC.  
Applicant address :
3050 Bowers Avenue, Santa Clara, CA 95054  
Old name :
 
Original Source :
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Same Inventor