Apparatus and method for treating objects with radicals generated from plasma
A Standard patent application filed on 04 November 2003 credited to Erez, Shmuel ; Gadgil, Prasad N.

Details

Application number :

2003295391  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus and method for treating objects with radicals generated from plasma  

Inventor :

Erez, Shmuel ; Gadgil, Prasad N.  

Agent name :

 

Address for service :

 

Filing date :

04 November 2003  

Associated companies :

 

Applicant name :

GADGIL, Prasad, N.  

Applicant address :

301 Rosemont Drive, Santa Clara, CA 95051  

Old name :

 

Original Source :

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