Plasma chemical vapor deposition methods and apparatus
A Standard patent application filed on 28 October 2002 credited to Lane, Barton G. Iii
;
Khanna, Samir
;
Mazumder, Prantik
;
House, Keith L.
Details
Application number :
2002340316
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Plasma chemical vapor deposition methods and apparatus
Inventor :
Lane, Barton G. Iii
;
Khanna, Samir
;
Mazumder, Prantik
;
House, Keith L.